Active matrix electroluminescence device having a metallic protective layer and method for fabricating the same

ABSTRACT

An active matrix electroluminescence display device and a method for fabricating the same, whereby damage caused by UV light rays during the fabrication process can be prevented, are disclosed. The active matrix electroluminescence display device includes a plurality of transistors formed on a substrate having an emissive area and a non-emissive area defined thereon, an insulating layer formed on the substrate and the thin film transistors, a metallic protective layer formed on the insulating layer of the non-emissive area, a first electrode formed on the insulating layer of the emissive area, an electroluminous layer formed on the first electrode, and a second electrode formed on the electroluminous layer.

This application is a Continuation application of Ser. No. 10/836,348filed May 3, 2004. The disclosures of the previous application isincorporated by reference herein.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an electroluminescence device, and moreparticularly, to an active matrix electroluminescence device and amethod for fabricating the same. Although the present invention issuitable for a wide scope of applications, it is particularly suitablefor preventing damage caused by UV light rays during the fabricationprocess.

2. Discussion of the Related Art

An electroluminescence device is being viewed as a next generation flatdisplay device for its characteristics of a wide viewing angle, a highaperture ratio, and a high chromaticity. More specifically, in anorganic electroluminescence (EL) device, when an electric charge isinjected into an organic electroluminous (EL) layer formed between ahole injection electrode and an electron injection electrode, theelectron and the hole are paired to each other generating an exciton,the excited state of which falls to a ground state, thereby emittinglight. Thus, the organic electroluminescence device (ELD) can beoperated at a lower voltage, as compared to other display devices.

Depending upon the driving method, the organic ELD can be classifiedinto a passivation ELD and an active matrix ELD. The passivation ELD isformed of a transparent electrode on a transparent substrate, an organicEL layer on the transparent electrode, and a cathode electrode on theorganic EL layer. The active matrix ELD is formed of a plurality of scanlines and data lines defining a pixel area on a substrate, a switchingdevice electrically connecting the scan lines and the data lines andcontrolling the electroluminescence device, a transparent electrode(ie., anode) electrically connected to the switching device and formedin the pixel area on the substrate, an organic EL layer on thetransparent electrode, and a metal electrode (i.e., cathode) on theorganic EL layer. Unlike the passivation ELD, the active matrix ELDfurther includes the switching device, which is a thin film transistor(TFT).

However, in the related art fabricating method, UV light rays are usedto carry out a surface treatment process both prior to and after formingthe organic EL layer. During the process, the UV light rays causedamages on devices, such as the thin film transistor. More specifically,such damages mainly occur in devices that are not in the emissive area,such as a gate driver or a data driver.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to an active matrixelectroluminescence device and a method for fabricating the same thatsubstantially obviate one or more problems due to limitations anddisadvantages of the related art.

An object of the present invention is to provide an active matrixelectroluminescence device and a method for fabricating the same, whichcan enhance the reliability of the device.

Additional advantages, objects, and features of the invention will beset forth in part in the description which follows and in part willbecome apparent to those having ordinary skill in the art uponexamination of the following or may be learned from practice of theinvention. The objectives and other advantages of the invention may berealized and attained by the structure particularly pointed out in thewritten description and claims hereof as well as the appended drawings.

To achieve these objects and other advantages and in accordance with thepurpose of the invention, as embodied and broadly described herein, anactive matrix electroluminescence display device includes a plurality oftransistors formed on a substrate having an emissive area and anon-emissive area defined thereon, an insulating layer formed on thesubstrate and the thin film transistors, a metallic protective layerformed on the insulating layer of the non-emissive area, a firstelectrode formed on the insulating layer of the emissive area, anelectroluminous layer formed on the first electrode, and a secondelectrode formed on the electroluminous layer.

Herein, the metallic protective layer is formed either on an entiresurface or a predetermined area of the insulating layer of thenon-emissive area. When the metallic protective layer and the firstelectrode are formed of the same material, the metallic protective layerand the first electrode are formed of an opaque metal. Conversely, whenthe metallic protective layer and the first electrode are formed of adifferent material, the metallic protective layer is formed of an opaquemetal, and the first electrode is formed of a transparent metal.

In order to prevent a capacitance with the thin film transistors fromoccurring, the metallic protective layer is electrically connected toone of a gate pad and a data pad.

In another aspect of the present invention, a method for fabricating anactive matrix electroluminescence display device includes forming aplurality of transistors on a substrate having an emissive area and anon-emissive area defined thereon, forming an insulating layer on thesubstrate and the thin film transistors, forming a metallic protectivelayer on the insulating layer of the non-emissive area, and forming afirst electrode on the insulating layer of the emissive area, forming anelectroluminous layer on the first electrode, and forming a secondelectrode on the electroluminous layer.

Herein, a metallic material layer is formed on an entire surface of theinsulating layer, the metallic material layer then being selectivelyremoved, so as to simultaneously form the first electrode and themetallic protective layer. Or, by using different materials, the firstelectrode and the metallic protective layer are formednon-simultaneously.

It is to be understood that both the foregoing general description andthe following detailed description of the present invention areexemplary and explanatory and are intended to provide furtherexplanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this application, illustrate embodiments of the invention andtogether with the description serve to explain the principle of theinvention. In the drawings;

FIGS. 1A to 1C illustrate a plane view and cross-sectional views of anactive matrix electroluminescence device according to a first embodimentof the present invention;

FIGS. 2A to 2C illustrate a plane view and cross-sectional views of theactive matrix electroluminescence device according to a secondembodiment of the present invention;

FIGS. 3A to 3C illustrate a plane view and cross-sectional views of anactive matrix electroluminescence device according to a third embodimentof the present invention;

FIGS. 4A to 4C illustrate a plane view and cross-sectional views of anactive matrix electroluminescence device according to a fourthembodiment of the present invention; and

FIGS. 5A and 5B illustrate cross-sectional views of the active matrixelectroluminescence device according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Reference will now be made in detail to the preferred embodiments of thepresent invention, examples of which are illustrated in the accompanyingdrawings. Wherever possible, the same reference numbers will be usedthroughout the drawings to refer to the same or like parts.

FIRST EMBODIMENT

FIGS. 1A to 1C illustrate a plane view and cross-sectional views of anactive matrix electroluminescence device according to a first embodimentof the present invention.

Referring to FIG. 1A, a pad part 2, an emissive area 3, and a circuitpart 8 are formed on a substrate 1. Herein, the pad part 2 is formed ofa gate pad, a data pad, and so on, and the emissive area 3 is formed ofa plurality of pixels. In addition, the circuit part 8 is formed on anon-emissive area as a gate driver or a data driver.

In addition, the active matrix electroluminescence device according tothe first embodiment of the present invention also includes a metallicprotective layer 10 formed on the circuit part 8 outside of the emissivearea 3, so as to prevent damages caused by the UV light rays fromoccurring in the circuit part 8. The metallic protective layer 10 isformed on the area excluding the pad part 2 and the emissive area 3 ofthe substrate 1.

The method for fabricating the active matrix electroluminescence deviceaccording to the first embodiment of the present invention will now bedescribed in detail.

Referring to FIGS. 1B and 1C, a plurality of thin film transistors 100and 200 are formed on a glass substrate 1. The thin film transistor 200formed within the emissive area 3 acts as a switch for controlling eachpixel, and the thin film transistor 100 formed outside of the emissivearea 3 acts as a gate driver or a data driver. Herein, the thin filmtransistors 100 and 200 are formed of source and drain electrodes 4 aand 4 b, a channel area 4 c, a gate insulating layer 5, and a gateelectrode 6.

Thereafter, an interlayer dielectric 7 is formed on the gate insulatinglayer 5 and the gate electrode 6. Then, the interlayer dielectric 7 andthe gate insulating layer 5 are selectively etched, so as to expose apredetermined portion of the surface of the source and drain electrodes4 a and 4 b, thereby forming a plurality of contact holes. The contactholes are then filled with a metal, thereby forming a plurality ofelectrode lines 9 each electrically connected to the source and drainelectrodes 4 a and 4 b.

Subsequently, an insulating material (e.g., a SiN_(x) group or SiO_(x)group material) is deposited on the interlayer dielectric 7 and theelectrode lines 9, thereby forming a protective layer 12. And, as shownin FIG. 1A, the metallic protective layer 10 is formed on an areaexcluding the pad part 2 and the emissive area 3. In other words, themetallic protective layer 10 is formed on the periphery of the emissivearea 3. There is a plurality of methods for selectively forming themetallic protective layer 10. For example, a metal layer is formed onthe entire surface of the protective layer 12, and then, the metallicprotective layer 10 may be formed by selectively removing the metallayer on the emissive area 3 and the pad part 2. The metallic protectivelayer 10 may also be selectively deposited on the protective layer 12 byusing a mask. Herein, the metallic protective layer 10 is formed of oneof or an alloy of chrome (Cr), copper (Cu), tungsten (W), gold (Au),nickel (Ni), silver (Ag), titanium (Ti), and tantalum (Ta).

Also, in order to reduce the capacitance occurring between the metallicprotective layer 10 and the thin film transistor 100, the metallicprotective layer 10 is electrically connected to the pad part 2 througha lining.

Moreover, referring to FIG. 1C, the protective layer 12 is selectivelyremoved, so as to expose the electrode line 9 connected to the drainelectrode 4 b within the emissive area 3. Herein, contact holes areformed in the area where the protective layer 12 is selectively removed.Subsequently, a metal is deposited on the entire surface of theprotective layer 12, so as to form a pixel electrode 11. In thebottom-emission electroluminescence device, the pixel electrode 11 isformed of a transparent material, such as indium-tin-oxide (ITO).Conversely, in the top-emission electroluminescence device, the pixelelectrode 11 is formed of a metal having high reflectivity and workfunction. The pixel electrode 11 is formed only in the pixel area withinthe emissive area and is connected to the electrode line 9 within theemissive area. Herein, the pixel electrode 11 is formed either beforeforming the metallic protective layer 10, or after forming the metallicprotective layer 10.

Thereafter, as shown in FIG. 5A, after depositing an insulating materialon the entire surface of the pixel electrode 11 and the protective layer12, the insulating material layer is selectively removed, so as to forman insulating layer 14 on the area excluding the pixel area, which isthe boundary area between each pixel area. The insulating layer 14 isformed above the thin film transistor 200 of the emissive area.Subsequently, an organic electroluminous (EL) layer 15 is formed on thepixel electrode 11 by using a shadow mask (not shown), and a commonelectrode 16 is formed on the organic EL layer 15 and the insulatinglayer 14.

Although not shown in the drawings, a protective layer (not shown) isformed to protect the organic EL layer 15 from oxygen or moisture.Finally, a protective cap is formed by using a sealant and a transparentsubstrate.

SECOND EMBODIMENT

FIGS. 2A to 2C illustrate a plane view and cross-sectional views of theactive matrix electroluminescence device according to a secondembodiment of the present invention.

Referring to FIG. 2A, a pad part 2, an emissive area 3, and a circuitpart 8 are formed on a substrate 1.

In addition, the active matrix electroluminescence device according tothe second embodiment of the present invention also includes a metallicprotective layer 20 formed on the circuit part 8 outside of the emissivearea 3, so as to prevent damages caused by the UV light rays fromoccurring in the circuit part 8. Referring to FIG. 2B, the metallicprotective layer 20 is selectively formed only on the devices, such asthe thin film transistor 100, which are formed outside of the emissivearea 3.

With the exception of the metallic protective layer 20, the structure ofthe second embodiment is the same as that of the first embodiment.

THIRD EMBODIMENT

FIGS. 3A to 3C illustrate a plane view and cross-sectional views of anactive matrix electroluminescence device according to a third embodimentof the present invention.

Referring to FIG. 3A, a pad part 2, an emissive area 3, and a circuitpart 8 are formed on a substrate 1.

In addition, the active matrix electroluminescence device according tothe third embodiment of the present invention also includes a metallicprotective layer 30 formed on the circuit part 8 outside of the emissivearea 3, so as to prevent damages caused by the UV light rays fromoccurring in the circuit part 8. Herein, the metallic protective layer30 is formed only on a region outside of the pad part 2 and the emissivearea 3.

The method for fabricating the active matrix electroluminescence deviceaccording to the third embodiment of the present invention will now bedescribed.

Referring to FIGS. 3B and 3C, a plurality of thin film transistors 100and 200 is formed on the glass substrate 41. The thin film transistor200 formed within the emissive area 3 acts as a switch for controllingeach pixel, and the thin film transistor 100 formed outside of theemissive area 3 acts as a gate driver or a data driver. Herein, the thinfilm transistors 100 and 200 are formed of source and drain electrodes 4a and 4 b, a channel area 4 c, a gate insulating layer 5, and a gateelectrode 6.

Thereafter, an interlayer dielectric 7 is formed on the gate insulatinglayer 5 and the gate electrode 6. Then, the interlayer dielectric 7 andthe gate insulating layer 5 are selectively etched, so as to expose apredetermined portion of the surface of the source and drain electrodes4 a and 4 b, thereby forming a plurality of contact holes. The contactholes are then filled with a metal, thereby forming a plurality ofelectrode lines 9 each electrically connected to the source and drainelectrodes 4 a and 4 b.

Then, an insulating material (e.g., a SiN_(x) group or SiO_(x) groupmaterial) is deposited on the interlayer dielectric 7 and the electrodelines 9, thereby forming a protective layer 12. Then, a planarizationovercoat 17 is formed on the protective layer 12.

Subsequently, a metallic material layer is deposited on theplanarization overcoat 17, and the metallic material layer isselectively removed, so as to simultaneously form the pixel electrode 11and the metallic protective layer 30 of the same material. The pixelelectrode 11 is formed only on the pixel area within the emissive area 3and is connected to the electrode line 7 within the emissive area 3. Themetallic protective layer 30 is formed in the area excluding theemissive area 3 and the pad part 2, as shown in FIG. 3A. Morespecifically, the metallic protective layer 30 is formed on theperiphery of the emissive area 3. Herein, the pixel electrode 11 and themetallic protective layer 30 are formed of one of or an alloy of chrome(Cr), copper (Cu), tungsten (W), gold (Au), nickel (Ni), silver (Ag),titanium (Ti), and tantalum (Ta).

Also, in order to reduce the capacitance occurring between the metallicprotective layer 30 and the thin film transistor 100, the metallicprotective layer 30 is electrically connected to the pad part 2 througha lining.

Furthermore, as shown in FIG. 5B, after depositing an insulatingmaterial on the entire surface of the pixel electrode 11 and theplanarization overcoat 17, the insulating material layer is selectivelyremoved, so as to form an insulating layer 14 on the area excluding thepixel area, which is the boundary area between each pixel area.Subsequently, an organic electroluminous (EL) layer 15 is formed on thepixel electrode 11 by using a shadow mask (not shown), and a commonelectrode 16 is formed on the organic EL layer 15 and the insulatinglayer 14.

FOURTH EMBODIMENT

FIGS. 4A to 4C illustrate a plane view and cross-sectional views of anactive matrix electroluminescence device according to a fourthembodiment of the present invention.

Referring to FIG. 4A, a pad part 2, an emissive area 3, and a circuitpart 8 are formed on a substrate 1.

In addition, the active matrix electroluminescence device according tothe fourth embodiment of the present invention also includes a metallicprotective layer 40 formed on the circuit part 8 outside of the emissivearea 3, so as to prevent damages caused by the UV light rays fromoccurring in the circuit part 8. Referring to FIG. 4B, the metallicprotective layer 40 is selectively formed only on the devices, such asthe thin film transistor 100, which are formed outside of the emissivearea 3. Herein, the metallic protective layer 40 is formed of the samematerial as that of the pixel electrode 11.

With the exception of the metallic protective layer 40, the structure ofthe fourth embodiment is the same as that of the third embodiment.

In the aforementioned active matrix electroluminescence display deviceand the method for fabricating the same, the metallic protective layeris formed on devices outside of the emissive area, such as the thin filmtransistor, so as to prevent damage caused by the UV light rays fromoccurring during the fabrication process, thereby providing a highlyreliable device.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the present inventionwithout departing from the spirit or scope of the inventions. Thus, itis intended that the present invention covers the modifications andvariations of this invention provided they come within the scope of theappended claims and their equivalents.

1. An active matrix electroluminescence display device, comprising: asubstrate having an active area and a non-active area; a plurality oftransistors formed on the substrate of the non-active area; a firstelectrode formed on the transistors; a protective layer formed toprotect at least one of the transistors; a vertical location of theprotective layer and the first electrode arc substantially same.
 2. Thedevice according to claim 1, wherein the protective layer iselectrically coupled to a circuit to reduce capacitance occurringbetween the protective layer and the transistors.
 3. The deviceaccording to claim 1, wherein the protective layer is made of samematerial which the first electrode.
 4. The device according to claim 3,wherein the protective layer and the first electrode are formed of atleast one of chrome (Cr), copper (Cu), tungsten (W), gold (Au), nickel(Ni), silver (Ag), titanium (Ti), and tantalum (Ta).
 5. The deviceaccording to claim 1, wherein the protective layer and the firstelectrode arc formed of a different material.
 6. The device according toclaim 5, wherein the protective layer is formed of an opaque metal, andthe first electrode is formed of a transparent metal.
 7. An activematrix electroluminescence display device, comprising: a substratehaving an active area and a non-active area; a plurality of transistorsformed on the substrate of the non-active area; a first electrode formedon the transistors; a reflective layer formed to protect at least one ofthe transistors and reflect light; a vertical location of the reflectivelayer and the first electrode arc substantially same.
 8. The deviceaccording to claim 7, wherein the reflective layer is electricallycoupled to a circuit to reduce capacitance occurring between thereflective layer and the transistors.
 9. The device according to claim7, wherein the reflective layer is made of same material which the firstelectrode.
 10. The device according to claim 9, wherein the reflectivelayer and the first electrode arc formed of at least One of chrome (Cr),copper (Cu), tungsten (W), gold (Au), nickel (Ni), silver (Ag), titanium(Ti), and tantalum (Ta).
 11. The device according to claim 7, whereinthe reflective layer and the first electrode are formed of a differentmaterial.
 12. The device according to claim 11, wherein the reflectivelayer is formed of an opaque metal, and the first electrode is formed ofa transparent metal.
 13. An active matrix electroluminescence displaydevice, comprising: a substrate having an active area and a non-activearea; a insulating layer formed in the active area and the non-activearea; a first electrode formed on the insulating layer in the activearea; a light emitting layer formed on the first electrode; a secondelectrode formed on the light emission layer; a protective layer formedon the insulating layer in the non-active area; a transistor located inat least one of a upper part area and a lower part area of theprotective layer.
 14. The device according to claim 13, wherein theprotective layer is electrically coupled to a circuit to reducecapacitance occurring between the protective layer and the transistors.15. The device according to claim 13, wherein the protective layer ismade of same material which the first electrode.
 16. The deviceaccording to claim 15, wherein the protective layer and the lieselectrode are formed of at least one of chrome (Cr), copper (Cu),tungsten (W), gold (Au), nickel (Ni), silver (Ag), titanium (Ti), andtantalum (Ta).
 17. The device according to claim 15, wherein theprotective layer and the first electrode are formed of a differentmaterial.
 18. The device according to claim 17, wherein the protectivelayer is formed of an opaque metal, and the first electrode is formed ofa transparent metal.